Inventor
SNEH OFER
US37 patents
⚠️ This page may combine multiple inventors who share the name “SNEH OFER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GENUS INC
15 patentsUS6638859B2Oct 28, 2003
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition
GENUS INC154 citations99
US6602784B2Aug 5, 2003
Radical-assisted sequential CVD
GENUS INC96 citations99
US6551399B1Apr 22, 2003
Fully integrated process for MIM capacitors using atomic layer deposition
GENUS INC169 citations99
US6503330B1Jan 7, 2003
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition
GENUS INC616 citations99
US6475910B1Nov 5, 2002
Radical-assisted sequential CVD
GENUS INC263 citations99
US6451695B2Sep 17, 2002
Radical-assisted sequential CVD
GENUS INC372 citations99
US6200893B1Mar 13, 2001
Radical-assisted sequential CVD
GENUS INC1,023 citations99
US6617173B1Sep 9, 2003
Integration of ferromagnetic films with ultrathin insulating film using atomic layer deposition
GENUS INC78 citations98
US6540838B2Apr 1, 2003
Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition
GENUS INC447 citations98
US6451119B2Sep 17, 2002
Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition
GENUS INC341 citations98
US6305314B1Oct 23, 2001
Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition
GENUS INC487 citations98
US6638862B2Oct 28, 2003
Radical-assisted sequential CVD
GENUS INC58 citations96
US6630401B2Oct 7, 2003
Radical-assisted sequential CVD
GENUS INC52 citations96
US6863021B2Mar 8, 2005
Method and apparatus for providing and integrating a general metal delivery source (GMDS) with atomic layer deposition (ALD)
GENUS INC29 citations93
US6897119B1May 24, 2005
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition
GENUS INC46 citations92
SUNDEW TECHNOLOGIES LLC
8 patentsUS7682454B2Mar 23, 2010
Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems
SUNDEW TECHNOLOGIES LLC550 citations99
US6911092B2Jun 28, 2005
ALD apparatus and method
SUNDEW TECHNOLOGIES LLC583 citations99
US7250083B2Jul 31, 2007
ALD method and apparatus
SUNDEW TECHNOLOGIES LLC75 citations98
US8012261B2Sep 6, 2011
ALD apparatus and method
SUNDEW TECHNOLOGIES LLC16 citations92
US7744060B2Jun 29, 2010
Fail-safe pneumatically actuated valve with fast time response and adjustable conductance
SUNDEW TECHNOLOGIES LLC30 citations92
US6897508B2May 24, 2005
Integrated capacitor with enhanced capacitance density and method of fabricating same
SUNDEW TECHNOLOGIES LLC47 citations92
US7635502B2Dec 22, 2009
ALD apparatus and method
SUNDEW TECHNOLOGIES LLC12 citations84
US7608539B2Oct 27, 2009
ALD method and apparatus
SUNDEW TECHNOLOGIES LLC8 citations84
SNEH OFER
5 patentsUS8083205B2Dec 27, 2011
Fail safe pneumatically actuated valve with fast time response and adjustable conductance
SNEH OFER26 citations92
US7662233B2Feb 16, 2010
ALD apparatus and method
SNEH OFER42 citations92
US8252116B2Aug 28, 2012
Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems
SNEH OFER12 citations84
US9181097B2Nov 10, 2015
Apparatus and methods for safely providing hazardous reactants
SNEH OFER2 citations53
US8673394B2Mar 18, 2014
Deposition method and apparatus
SNEH OFER0 citations52
LUCENT TECHNOLOGIES INC
4 patentsUS5949944ASep 7, 1999
Apparatus and method for dissipating charge from lithium niobate devices
LUCENT TECHNOLOGIES INC36 citations90
US6189238B1Feb 20, 2001
Portable purge system for transporting materials
LUCENT TECHNOLOGIES INC11 citations74
US6037268AMar 14, 2000
Method for etching tantalum oxide
LUCENT TECHNOLOGIES INC13 citations74
US6007685ADec 28, 1999
Deposition of highly doped silicon dioxide films
LUCENT TECHNOLOGIES INC3 citations60