Inventor

MISSALLA THOMAS

DE4 patents

⚠️ This page may combine multiple inventors who share the name “MISSALLA THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XTREME TECH GMBH

2 patents

US7328885B2Feb 12, 2008

Plasma radiation source and device for creating a gas curtain for plasma radiation sources

XTREME TECH GMBH14 citations78

US7329876B2Feb 12, 2008

Narrow-band transmission filter for EUV radiation

XTREME TECH GMBH6 citations68

MISSALLA THOMAS

1 patent

US8686372B2Apr 1, 2014

Method for the spatially resolved measurement of parameters in a cross section of a beam bundle of high-energy radiation of high intensity

MISSALLA THOMAS2 citations47

RI RES INSTRUMENTS GMBH

1 patent

US11615897B2Mar 28, 2023

Microscopic system for testing structures and defects on EUV lithography photomasks

RI RES INSTRUMENTS GMBH0 citations33