Inventor
METT RICHARD RAYMOND
US5 patents
⚠️ This page may combine multiple inventors who share the name “METT RICHARD RAYMOND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6273022B1Aug 14, 2001
Distributed inductively-coupled plasma source
APPLIED MATERIALS INC96 citations97
US6568346B2May 27, 2003
Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply
APPLIED MATERIALS INC66 citations95
US5737177AApr 7, 1998
Apparatus and method for actively controlling the DC potential of a cathode pedestal
APPLIED MATERIALS INC93 citations93