Inventor

GIBILARO GREGORY R

US2 patents

⚠️ This page may combine multiple inventors who share the name “GIBILARO GREGORY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US7442944B2Oct 28, 2008

Ion beam implant current, spot width and position tuning

VARIAN SEMICONDUCTOR EQUIPMENT9 citations79

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent

US9738968B2Aug 22, 2017

Apparatus and method for controlling implant process

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations48