Inventor

NORRIS GREGG A

US3 patents

⚠️ This page may combine multiple inventors who share the name “NORRIS GREGG A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US7663125B2Feb 16, 2010

Ion beam current uniformity monitor, ion implanter and related method

VARIAN SEMICONDUCTOR EQUIPMENT8 citations81

US7442944B2Oct 28, 2008

Ion beam implant current, spot width and position tuning

VARIAN SEMICONDUCTOR EQUIPMENT9 citations79

VARIAN SEMICONDUCTOR ASSOCIATE

1 patent

US7453070B2Nov 18, 2008

Methods and apparatus for beam density measurement in two dimensions

VARIAN SEMICONDUCTOR ASSOCIATE10 citations78