Inventor

WATANABE TATEKI

JP2 patents

Patents

2 patents

US7589335B2Sep 15, 2009

Charged-particle beam pattern writing method and apparatus and software program for use therein

NUFLARE TECHNOLOGY INC12 citations80

US7476881B2Jan 13, 2009

Charged beam drawing apparatus and charged beam drawing method

NUFLARE TECHNOLOGY INC3 citations59