Inventor
MOEGGENBORG KEVIN
US11 patents
⚠️ This page may combine multiple inventors who share the name “MOEGGENBORG KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
6 patentsUS6776810B1Aug 17, 2004
Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
CABOT MICROELECTRONICS CORP112 citations96
US7306637B2Dec 11, 2007
Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
CABOT MICROELECTRONICS CORP27 citations91
US6589100B2Jul 8, 2003
Rare earth salt/oxidizer-based CMP method
CABOT MICROELECTRONICS CORP31 citations90
US7998866B2Aug 16, 2011
Silicon carbide polishing method utilizing water-soluble oxidizers
CABOT MICROELECTRONICS CORP7 citations82
US7678700B2Mar 16, 2010
Silicon carbide polishing method utilizing water-soluble oxidizers
CABOT MICROELECTRONICS CORP7 citations72
US9303187B2Apr 5, 2016
Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials
CABOT MICROELECTRONICS CORP1 citations45