Inventor
SCHEDEWIE FRANZ
DE4 patents
Patents
4 patentsUS4275288AJun 23, 1981
Apparatus for machining material
IBM90 citations91
US4498771AFeb 12, 1985
Method and means for interferometric surface topography
IBM23 citations80
US4626907ADec 2, 1986
Method and apparatus for mutually aligning objects
IBM24 citations78
US4310247AJan 12, 1982
Method and apparatus for analyzing the state of polarization of radiation
IBM7 citations71