Inventor
DURSCHLAG MARK S
US5 patents
Patents
5 patentsUS4670297AJun 2, 1987
Evaporated thick metal and airbridge interconnects and method of manufacture
RAYTHEON CO63 citations94
US4458295AJul 3, 1984
Lumped passive components and method of manufacture
RAYTHEON CO54 citations94
US4807022AFeb 21, 1989
Simultaneous formation of via hole and tub structures for GaAs monolithic microwave integrated circuits
RAYTHEON CO50 citations91
US5646450AJul 8, 1997
Semiconductor structures and method of manufacturing
RAYTHEON CO22 citations89
US4927784AMay 22, 1990
Simultaneous formation of via hole and tube structures for GaAs monolithic microwave integrated circuits
RAYTHEON CO22 citations81