Inventor
ITAGAKI TATSUO
JP5 patents
Patents
5 patentsUS4999096AMar 12, 1991
Method of and apparatus for sputtering
HITACHI LTD196 citations98
US5061985AOct 29, 1991
Semiconductor integrated circuit device and process for producing the same
HITACHI LTD164 citations96
US5175608ADec 29, 1992
Method of and apparatus for sputtering, and integrated circuit device
HITACHI LTD55 citations95
US5019891AMay 28, 1991
Semiconductor device and method of fabricating the same
HITACHI LTD29 citations89
US5051812ASep 24, 1991
Semiconductor device and method for manufacturing the same
HITACHI LTD19 citations73