Inventor
ZENG ANDREW
US11 patents
⚠️ This page may combine multiple inventors who share the name “ZENG ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS7038772B2May 2, 2006
System and methods for classifying anomalies of sample surfaces
KLA TENCOR CORP16 citations91
US6590645B1Jul 8, 2003
System and methods for classifying anomalies of sample surfaces
KLA TENCOR CORP26 citations91
US6862096B2Mar 1, 2005
Defect detection system
KLA TENCOR CORP22 citations90
US7315365B2Jan 1, 2008
System and methods for classifying anomalies of sample surfaces
KLA TENCOR CORP4 citations72
US7016031B2Mar 21, 2006
System and methods for classifying anomalies of sample surfaces
KLA TENCOR CORP9 citations72
US10571248B2Feb 25, 2020
Transparent film error correction pattern in wafer geometry system
KLA TENCOR CORP3 citations70
US10236222B2Mar 19, 2019
System and method for measuring substrate and film thickness distribution
KLA TENCOR CORP0 citations48