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Inventor
MOROBOSHI YASUO
JP
2 patents
Patents
2 patents
US5374382A
Dec 20, 1994
Method of generation and recovery of ultra-fine particles
KONISHIROKU PHOTO IND
11 citations
71
US4601922A
Jul 22, 1986
Method of forming a layer of thin film on a substrate having a multiplicity of mesh-like holes
KONISHIROKU PHOTO IND
8 citations
69