Inventor

HSIA CHUN-HUNG

TW2 patents

Patents

2 patents

US7482244B2Jan 27, 2009

Method of preventing a peeling issue of a high stressed thin film

UNITED MICROELECTRONICS CORP0 citations45

US7732009B2Jun 8, 2010

Method of cleaning reaction chamber, method of forming protection film and protection wafer

UNITED MICROELECTRONICS CORP0 citations40