Inventor
WANG HSIAO-YI
TW4 patents
Patents
4 patentsUS9601436B2Mar 21, 2017
Method for semiconductor wafer alignment
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations65
US9941131B1Apr 10, 2018
Method for applying developer on semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations63
US11145521B2Oct 12, 2021
Method for cleaning a semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9952520B2Apr 24, 2018
Method for semiconductor wafer alignment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45