Inventor
TSIANG MICHAEL
US3 patents
Patents
3 patentsUS9157730B2Oct 13, 2015
PECVD process
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US9490116B2Nov 8, 2016
Gate stack materials for semiconductor applications for lithographic overlay improvement
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US10030306B2Jul 24, 2018
PECVD apparatus and process
APPLIED MATERIALS INC1 citations62