Inventor
VY VAN VUONG
NL4 patents
Patents
4 patentsUS9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10018926B2Jul 10, 2018
Lithographic apparatus and method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations48