Inventor
TABERY CYRUS EMIL
US9 patents
Patents
9 patentsUS12044980B2Jul 23, 2024
Method of manufacturing devices
ASML NETHERLANDS BV3 citations72
US12055904B2Aug 6, 2024
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV2 citations71
US11803127B2Oct 31, 2023
Method for determining root cause affecting yield in a semiconductor manufacturing process
ASML NETHERLANDS BV3 citations71
US11947266B2Apr 2, 2024
Method for controlling a manufacturing process and associated apparatuses
ASML NETHERLANDS BV5 citations70
US11181829B2Nov 23, 2021
Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations61
US11714357B2Aug 1, 2023
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV0 citations59
US11086229B2Aug 10, 2021
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV1 citations59
US12169366B2Dec 17, 2024
Voltage contrast metrology mark
ASML NETHERLANDS BV0 citations49
US12567558B2Mar 3, 2026
Systems and methods for pulsed voltage contrast detection and capture of charging dynamics
ASML NETHERLANDS BV0 citations48