Inventor
KUSTRA RICK
US5 patents
Patents
5 patentsUS11721545B2Aug 8, 2023
Method of using dual frequency RF power in a process chamber
APPLIED MATERIALS INC2 citations70
US12106958B2Oct 1, 2024
Method of using dual frequency RF power in a process chamber
APPLIED MATERIALS INC0 citations60
US11495454B2Nov 8, 2022
Deposition of low-stress boron-containing layers
APPLIED MATERIALS INC0 citations60
US11404263B2Aug 2, 2022
Deposition of low-stress carbon-containing layers
APPLIED MATERIALS INC0 citations60
US12460298B2Nov 4, 2025
Showerhead design to control stray deposition
APPLIED MATERIALS INC0 citations59