Inventor

KWAN MICHAEL

US9 patents

⚠️ This page may combine multiple inventors who share the name “KWAN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DECECCO PAOLA

3 patents

US8269167B2Sep 18, 2012

Method and system for non-destructive distribution profiling of an element in a film

DECECCO PAOLA9 citations81

US9201030B2Dec 1, 2015

Method and system for non-destructive distribution profiling of an element in a film

DECECCO PAOLA2 citations60

US8610059B2Dec 17, 2013

Method and system for non-destructive distribution profiling of an element in a film

DECECCO PAOLA2 citations60

APPLIED MATERIALS INC

2 patents

US6335288B1Jan 1, 2002

Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD

APPLIED MATERIALS INC378 citations98

US7052552B2May 30, 2006

Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD

APPLIED MATERIALS INC13 citations83

REVERA INC

2 patents

US7884321B2Feb 8, 2011

Method and system for non-destructive distribution profiling of an element in a film

REVERA INC10 citations91

US7411188B2Aug 12, 2008

Method and system for non-destructive distribution profiling of an element in a film

REVERA INC24 citations89

NOVA MEASURING INSTR INC

1 patent

US11733035B2Aug 22, 2023

Feed-forward of multi-layer and multi-process information using XPS and XRF technologies

NOVA MEASURING INSTR INC0 citations58

REVARA INC

1 patent

US8916823B2Dec 23, 2014

Method and system for non-destructive distribution profiling of an element in a film

REVARA INC0 citations40