Inventor

CHOU YUEH-LIN

TW4 patents

⚠️ This page may combine multiple inventors who share the name “CHOU YUEH-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

2 patents

US5478679ADec 26, 1995

Half-tone self-aligning phase shifting mask

UNITED MICROELECTRONICS CORP14 citations68

US7498105B2Mar 3, 2009

Method for checking phase shift angle of phase shift mask, lithography process and phase shift mask

UNITED MICROELECTRONICS CORP0 citations50

WORLDWIDE SEMICONDUCTOR MANUFA

1 patent

US6015641AJan 18, 2000

Reduction of optical proximity effect of bit line pattern in DRAM devices

WORLDWIDE SEMICONDUCTOR MANUFA14 citations69

WORLDWIDE SEMICONDUCTOR MFG

1 patent

US6492069B1Dec 10, 2002

Method for forming an attenuated phase-shifting mask

WORLDWIDE SEMICONDUCTOR MFG11 citations62