Inventor

BOEHM JR ROBERT G

US5 patents

⚠️ This page may combine multiple inventors who share the name “BOEHM JR ROBERT G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US6186865B1Feb 13, 2001

Apparatus and method for performing end point detection on a linear planarization tool

LAM RES CORP38 citations92

US6224461B1May 1, 2001

Method and apparatus for stabilizing the process temperature during chemical mechanical polishing

LAM RES CORP44 citations91

ULVAC INC

1 patent

US7901026B2Mar 8, 2011

Drop analysis system

ULVAC INC21 citations88

ALBERTALLI DAVID

1 patent

US8075080B2Dec 13, 2011

Camera-based automatic nozzle and substrate alignment system

ALBERTALLI DAVID8 citations78

STJOHNS MICHAEL C

1 patent

US9542713B2Jan 10, 2017

Systems and methods for securing the manufacturing supply chain

STJOHNS MICHAEL C2 citations62