Inventor
CATABAY WILBUR
US6 patents
⚠️ This page may combine multiple inventors who share the name “CATABAY WILBUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
4 patentsUS5926720AJul 20, 1999
Consistent alignment mark profiles on semiconductor wafers using PVD shadowing
LSI LOGIC CORP64 citations94
US6204550B1Mar 20, 2001
Method and composition for reducing gate oxide damage during RF sputter clean
LSI LOGIC CORP20 citations92
US5994211ANov 30, 1999
Method and composition for reducing gate oxide damage during RF sputter clean
LSI LOGIC CORP20 citations92
US6239499B1May 29, 2001
Consistent alignment mark profiles on semiconductor wafers using PVD shadowing
LSI LOGIC CORP18 citations91