Inventor · disambiguated record

Neal B. Gallagher

Also filed as: GALLAGHER NEAL B

1 granted patent·39 citations·filing 2002–2002

47Inventor score

Technology areasG01N

Files withVERITY INSTR INC1

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1 record

0184US6830939B2System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectraVERITY INSTR INC·Filed 2002·Granted Dec 14, 2004·39 cites·29 claims

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