P

Inventor

YAMAGUCHI TAKAKO

JP28 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI TAKAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

23 patents
US6408123B1Jun 18, 2002

Near-field optical probe having surface plasmon polariton waveguide and method of preparing the same as well as microscope, recording/regeneration apparatus and micro-fabrication apparatus using the same

CANON KK161 citations99
US6628392B2Sep 30, 2003

Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof

CANON KK54 citations96
US7399445B2Jul 15, 2008

Chemical sensor

CANON KK39 citations92
US7022463B2Apr 4, 2006

Near-field exposure photoresist and fine pattern forming method using the same

CANON KK19 citations92
US6849391B2Feb 1, 2005

Photoresist, photolithography method using the same, and method for producing photoresist

CANON KK20 citations92
US6785445B2Aug 31, 2004

Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe

CANON KK31 citations92
US6720115B2Apr 13, 2004

Exposure method and exposure apparatus using near-field light and exposure mask

CANON KK35 citations92
US6632593B2Oct 14, 2003

Pattern-forming method using photomask, and pattern-forming apparatus

CANON KK22 citations92
US6559926B2May 6, 2003

Pattern forming apparatus and pattern forming method

CANON KK49 citations92
US7733491B2Jun 8, 2010

Sensor device and testing method utilizing localized plasmon resonance

CANON KK14 citations84
US7863061B2Jan 4, 2011

Surface emitting laser manufacturing method, surface emitting laser array manufacturing method, surface emitting laser, surface emitting laser array, and optical apparatus including surface emitting laser array

CANON KK6 citations74
US7691540B2Apr 6, 2010

Exposure mask, method of designing and manufacturing the same, exposure method and apparatus, pattern forming method, and device manufacturing method

CANON KK6 citations63
US7659039B2Feb 9, 2010

Near-field exposure mask, method of producing that mask, near-field exposure apparatus having that mask, and resist pattern forming method

CANON KK6 citations63
US7592108B2Sep 22, 2009

Method of detecting relative position of exposure mask and object to be exposed, alignment method, and exposure method using the same

CANON KK5 citations63
US7547503B2Jun 16, 2009

Photosensitive silane coupling agent, method of forming pattern, and method of fabricating device

CANON KK5 citations63
US7419763B2Sep 2, 2008

Near-field exposure photoresist and fine pattern forming method using the same

CANON KK3 citations63
US7190438B2Mar 13, 2007

Near-field exposure apparatus and near-field exposure photomask

CANON KK5 citations63
US7136145B2Nov 14, 2006

Pattern-forming apparatus using a photomask

CANON KK4 citations63
US7776509B2Aug 17, 2010

Photosensitive compound, photosensitive composition, resist pattern forming method, and device production process

CANON KK0 citations52
US7704672B2Apr 27, 2010

Photosensitive silane coupling agent, method of modifying surface, method of forming pattern, and method of fabricating device

CANON KK0 citations52
US7615332B2Nov 10, 2009

Photosensitive compound, photosensitive composition, resist pattern forming method, and device production process

CANON KK0 citations52
US7303859B2Dec 4, 2007

Photoresist, photolithography method using the same, and method for producing photoresist

CANON KK0 citations52
US7651834B2Jan 26, 2010

Photosensitive compound, photosensitive composition, method for resist pattern formation, and process for device production

CANON KK0 citations42

HOUMURA TOSHIKAZU

3 patents

IKUTA MITSUHIRO

1 patent

FUJITSU LTD

1 patent