Inventor
SAKAKI YASUHIKO
JP7 patents
Patents
7 patentsUS6454918B1Sep 24, 2002
Cup type plating apparatus
ELECTROPLATING ENG53 citations94
US6875333B2Apr 5, 2005
Plating apparatus for wafer
ELECTROPLATING ENG25 citations90
US6482300B2Nov 19, 2002
Cup shaped plating apparatus with a disc shaped stirring device having an opening in the center thereof
ELECTROPLATING ENG21 citations90
US7108776B2Sep 19, 2006
Plating apparatus and plating method
ELECTROPLATING ENG18 citations82
US6991711B2Jan 31, 2006
Cup type plating apparatus
ELECTROPLATING ENG5 citations71
US6610182B2Aug 26, 2003
Cup-type plating apparatus and method for plating wafers
ELECTROPLATING ENG8 citations71
US6332963B1Dec 25, 2001
Cup-type plating apparatus and method for plating wafer using the same
ELECTROPLATING ENG10 citations65