Inventor
CHOI NARAK
KR3 patents
Patents
3 patentsUS12181792B2Dec 31, 2024
Optical proximity correction method and method of manufacturing extreme ultraviolet mask by using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US11169437B2Nov 9, 2021
Optical proximity correction (OPC) methods and methods of manufacturing masks using the OPC methods
SAMSUNG ELECTRONICS CO LTD1 citations53
US9461003B1Oct 4, 2016
Semiconductor devices having shielding pattern
SAMSUNG ELECTRONICS CO LTD2 citations53