Inventor

PARK GOON HO

KR4 patents

Patents

4 patents

US11823874B2Nov 21, 2023

Substrate treating apparatus and method for controlling temperature of ferrite core

SEMES CO LTD2 citations70

US12051565B2Jul 30, 2024

Substrate treating apparatus and impedance matching method

SEMES CO LTD2 citations67

US11587770B2Feb 21, 2023

Apparatus and method for treating substrate

SEMES CO LTD1 citations53

US12087547B2Sep 10, 2024

Device for multi-level pulsing, substrate processing apparatus including the same

SEMES CO LTD0 citations44