Inventor
LIM WANGYU
KR6 patents
Patents
6 patentsUS11274369B2Mar 15, 2022
Thin film deposition method
ASM IP HOLDING BV6 citations68
US11562901B2Jan 24, 2023
Substrate processing method
ASM IP HOLDING BV0 citations55
US12283479B2Apr 22, 2025
Substrate processing method
ASM IP HOLDING BV0 citations54
US12451347B2Oct 21, 2025
Semiconductor processing method
ASM IP HOLDING BV0 citations45
US12392038B2Aug 19, 2025
Thin-film deposition method and system
ASM IP HOLDING BV0 citations45
US11551925B2Jan 10, 2023
Method for manufacturing a semiconductor device
ASM IP HOLDING BV0 citations44