Inventor
PARK YOON-SEI
KR2 patents
Patents
2 patentsUS6113754ASep 5, 2000
Sputtering apparatus having a target backing plate equipped with a cooling line and sputtering method using the same
SAMSUNG ELECTRONICS CO LTD35 citations89
US6819969B2Nov 16, 2004
Chemical vapor deposition process and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD16 citations79