Inventor
HALLE SCOTT DAVID
US4 patents
Patents
4 patentsUS6316167B1Nov 13, 2001
Tunabale vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and application thereof
IBM189 citations98
US6514667B2Feb 4, 2003
Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof
IBM108 citations97
US12086528B2Sep 10, 2024
Secure fingerprinting of a trusted photomask
IBM0 citations61
US8053172B2Nov 8, 2011
Photoresists and methods for optical proximity correction
IBM2 citations61