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Inventor
KOMATSUBARA GAKUO
JP
2 patents
Patents
2 patents
US6737660B2
May 18, 2004
Electron beam irradiation apparatus and electron beam irradiating method
SONY CORP
13 citations
82
US6831278B2
Dec 14, 2004
System and method for electron beam irradiation
SONY CORP
12 citations
72