Inventor
HOSOYA MORIO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “HOSOYA MORIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYA CORP
11 patentsUS7390596B2Jun 24, 2008
Reflection type mask blank and reflection type mask and production methods for them
HOYA CORP42 citations92
US6749973B2Jun 15, 2004
Reflection type mask blank for EUV exposure and reflection type mask for EUV exposure as well as method of producing the mask
HOYA CORP14 citations84
US6737201B2May 18, 2004
Substrate with multilayer film, reflection type mask blank for exposure, reflection type mask for exposure and production method thereof as well as production method of semiconductor device
HOYA CORP14 citations84
US7981573B2Jul 19, 2011
Reflective mask blank, reflective mask and methods of producing the mask blank and the mask
HOYA CORP7 citations83
US7056627B2Jun 6, 2006
Method of manufacturing a reflection type mask blank and method of manufacturing a reflection type mask
HOYA CORP10 citations73
US9229315B2Jan 5, 2016
Reflective mask blank and method of manufacturing a reflective mask
HOYA CORP3 citations72
US7804648B2Sep 28, 2010
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask
HOYA CORP3 citations61
US9075314B2Jul 7, 2015
Photomask blank, photomask, and method for manufacturing photomask blank
HOYA CORP0 citations52
US7700245B2Apr 20, 2010
Reflective mask blank, reflective mask, and method of manufacturing semiconductor device
HOYA CORP0 citations52
US8709685B2Apr 29, 2014
Reflective mask blank and method of manufacturing a reflective mask
HOYA CORP1 citations51
US8021807B2Sep 20, 2011
Reflective mask blank and method of producing the same, and method of producing a reflective mask
HOYA CORP1 citations51
HOSOYA MORIO
4 patentsUS8546047B2Oct 1, 2013
Reflective mask blank and method of manufacturing a reflective mask
HOSOYA MORIO7 citations82
US8329361B2Dec 11, 2012
Reflective mask blank, method of manufacturing a reflective mask blank and method of manufacturing a reflective mask
HOSOYA MORIO4 citations60
US8389184B2Mar 5, 2013
Reflective mask blank and method of manufacturing a reflective mask
HOSOYA MORIO0 citations50
US8081384B2Dec 20, 2011
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask
HOSOYA MORIO0 citations39