Inventor
CHOU TZU-JEN
TW4 patents
Patents
4 patentsUS7253524B2Aug 7, 2007
Copper interconnects
TAIWAN SEMICONDUCTOR MFG9 citations73
US6924238B2Aug 2, 2005
Edge peeling improvement of low-k dielectric materials stack by adjusting EBR resistance
TAIWAN SEMICONDUCTOR MFG5 citations61
US6919276B2Jul 19, 2005
Method to reduce dishing and erosion in a CMP process
TAIWAN SEMICONDUCTOR MFG6 citations58
US7407601B2Aug 5, 2008
Polymeric particle slurry system and method to reduce feature sidewall erosion
TAIWAN SEMICONDUCTOR MFG0 citations51