Inventor
YOKOUCHI TOSHIAKI
JP2 patents
Patents
2 patentsUS7137179B2Nov 21, 2006
Method of forming a piezoelectric layer in forming a piezoelectric element including a lower electrode on one surface of a substrate
SEIKO EPSON CORP10 citations69
US7411339B2Aug 12, 2008
Manufacturing method of actuator device and liquid jet apparatus provided with actuator device formed by manufacturing method of the same
SEIKO EPSON CORP4 citations60