Inventor
ALLEN JR ERNEST E
US7 patents
⚠️ This page may combine multiple inventors who share the name “ALLEN JR ERNEST E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS10325752B1Jun 18, 2019
Performance extraction set
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC12 citations75
US10276340B1Apr 30, 2019
Low particle capacitively coupled components for workpiece processing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC6 citations68
US10974276B2Apr 13, 2021
Hydrophobic shafts for use in process chambers
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations56
US10569299B2Feb 25, 2020
Hydrophobic shafts for use in process chambers
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations56