Inventor
INOUE MITSUYA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “INOUE MITSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS9563209B2Feb 7, 2017
Raw material gas supply method
TOKYO ELECTRON LTD4 citations62
US11569558B2Jan 31, 2023
Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate
TOKYO ELECTRON LTD0 citations50
US11411541B2Aug 9, 2022
High frequency power supply device and high frequency power supply method
TOKYO ELECTRON LTD0 citations48