Inventor
LEE CHARLIE C J
TW3 patents
Patents
3 patentsUS7196019B2Mar 27, 2007
Method of removing spacers and fabricating MOS transistor
UNITED MICROELECTRONICS CORP2 citations59
US7220647B2May 22, 2007
Method of cleaning wafer and method of manufacturing gate structure
UNITED MICROELECTRONICS CORP0 citations48
US7135400B2Nov 14, 2006
Damascene process capable of avoiding via resist poisoning
UNITED MICROELECTRONICS CORP0 citations35