Inventor
BORODOVSKY YAN
US17 patents
⚠️ This page may combine multiple inventors who share the name “BORODOVSKY YAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
13 patentsUS7142282B2Nov 28, 2006
Device including contacts
INTEL CORP20 citations92
US5946079AAug 31, 1999
Photolithography method using coherence distance control
INTEL CORP18 citations92
US5840448ANov 24, 1998
Phase shifting mask having a phase shift that minimizes critical dimension sensitivity to manufacturing and process variance
INTEL CORP22 citations92
US6021009AFeb 1, 2000
Method and apparatus to improve across field dimensional control in a microlithography tool
INTEL CORP43 citations91
US6069739AMay 30, 2000
Method and lens arrangement to improve imaging performance of microlithography exposure tool
INTEL CORP51 citations86
US7512926B2Mar 31, 2009
Phase-shifting masks with sub-wavelength diffractive optical elements
INTEL CORP8 citations84
US5801821ASep 1, 1998
Photolithography method using coherence distance control
INTEL CORP15 citations81
US7732106B2Jun 8, 2010
Methods for etching devices used in lithography
INTEL CORP2 citations62
US7611806B2Nov 3, 2009
Sub-wavelength diffractive elements to reduce corner rounding
INTEL CORP2 citations62
US7245352B2Jul 17, 2007
Alignment using latent images
INTEL CORP2 citations62
US7254803B2Aug 7, 2007
Test structures for feature fidelity improvement
INTEL CORP4 citations61
US7892706B2Feb 22, 2011
Sub-wavelength diffractive elements to reduce corner rounding
INTEL CORP1 citations51
US7438997B2Oct 21, 2008
Imaging and devices in lithography
INTEL CORP0 citations51