Inventor

SLODOWSKI MATTHIAS

DE6 patents

⚠️ This page may combine multiple inventors who share the name “SLODOWSKI MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEICA MICROSYSTEMS

3 patents

US6456373B1Sep 24, 2002

Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrument

LEICA MICROSYSTEMS54 citations91

US6618154B2Sep 9, 2003

Optical measurement arrangement, in particular for layer thickness measurement

LEICA MICROSYSTEMS7 citations71

US6775583B2Aug 10, 2004

Method and apparatus for user guidance in optical inspection and measurement of thin films and substrates, and software therefore

LEICA MICROSYSTEMS5 citations53

VISTEC SEMICONDUCTOR SYSTEMS J

2 patents

US7349106B2Mar 25, 2008

Apparatus and method for thin-layer metrology

VISTEC SEMICONDUCTOR SYSTEMS J2 citations58

US7277190B2Oct 2, 2007

Measurement system with an optical measurement arrangement

VISTEC SEMICONDUCTOR SYSTEMS J0 citations36

DOERING HANS-JOACHIM

1 patent

US8148702B2Apr 3, 2012

Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns

DOERING HANS-JOACHIM16 citations76