Inventor
GEORGE MARK ALLEN
US4 patents
Patents
4 patentsUS6314986B1Nov 13, 2001
Gas control device and method of supplying gas
AIR PROD & CHEM77 citations94
US6648021B2Nov 18, 2003
Gas control device and method of supplying gas
AIR PROD & CHEM30 citations91
US6527009B2Mar 4, 2003
Gas control device and method of supplying gas
AIR PROD & CHEM19 citations91
US6159859ADec 12, 2000
Gas phase removal of SiO2 /metals from silicon
AIR PROD & CHEM22 citations86