Inventor
CHANG YUNG SHAN
US3 patents
Patents
3 patentsUS6660612B1Dec 9, 2003
Design to prevent tungsten oxidation at contact alignment in FeRAM
TEXAS INSTRUMENTS INC30 citations89
US12170256B2Dec 17, 2024
Contact pad fabrication process for a semiconductor product
TEXAS INSTRUMENTS INC0 citations58
US9716013B2Jul 25, 2017
Sloped photoresist edges for defect reduction for metal dry etch processes
TEXAS INSTRUMENTS INC1 citations49