Inventor
HEDBERG CHUCK E
US3 patents
Patents
3 patentsUS7059267B2Jun 13, 2006
Use of pulsed grounding source in a plasma reactor
MICRON TECHNOLOGY INC69 citations95
US7297637B2Nov 20, 2007
Use of pulsed grounding source in a plasma reactor
MICRON TECHNOLOGY INC32 citations90
US6485572B1Nov 26, 2002
Use of pulsed grounding source in a plasma reactor
MICRON TECHNOLOGY INC4 citations60