Inventor
FUJIMAKI Yousuke
JP4 patents
Patents
4 patentsUS11451003B2Sep 20, 2022
Laser gas regenerating apparatus and electronic device manufacturing method
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US12140869B2Nov 12, 2024
Line narrowed gas laser apparatus, control method therefor, electronic device manufacturing method
GIGAPHOTON INC1 citations54
US12542412B2Feb 3, 2026
Gas laser device and electronic device manufacturing method
GIGAPHOTON INC0 citations43
US10673200B2Jun 2, 2020
Excimer laser apparatus
GIGAPHOTON INC0 citations39