Inventor
SONG GIL HUN
KR6 patents
⚠️ This page may combine multiple inventors who share the name “SONG GIL HUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
5 patentsUS9587880B2Mar 7, 2017
Apparatus and method for drying substrate
SEMES CO LTD9 citations82
US9275852B2Mar 1, 2016
Substrate treating apparatus and substrate treating method
SEMES CO LTD2 citations60
US11594421B2Feb 28, 2023
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations59
US10699918B2Jun 30, 2020
Chemical supply unit and apparatus for treating a substrate
SEMES CO LTD1 citations58
US10232415B2Mar 19, 2019
Apparatus for treating substrate
SEMES CO LTD0 citations31