Inventor
SHIN MISO
KR4 patents
Patents
4 patentsUS10916554B2Feb 9, 2021
Three-dimensional semiconductor memory device
SAMSUNG ELECTRONICS CO LTD2 citations68
US11640922B2May 2, 2023
Gap-fill layers, methods of forming the same, and semiconductor devices manufactured by the methods of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US11257708B2Feb 22, 2022
Gap-fill layers, methods of forming the same, and semiconductor devices manufactured by the methods of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US10566338B2Feb 18, 2020
Three-dimensional semiconductor memory device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD1 citations58