Inventor

XIA SHIJING

US2 patents

Patents

2 patents

US11679531B2Jun 20, 2023

Chemical mechanical polishing pad and preparation thereof

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC2 citations68

US12220784B2Feb 11, 2025

Chemical mechanical polishing pad and preparation thereof

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations47