Inventor

ENGLHARDT ERIC A

US51 patents

⚠️ This page may combine multiple inventors who share the name “ENGLHARDT ERIC A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ENGLHARDT ERIC A

APPLIED MATERIALS INC

System for transporting substrate carriers

Substrate carrier having door latching and substrate clamping mechanisms

Break-away positioning conveyor mount for accommodating conveyor belt bends

Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring

System for transporting substrate carriers

Substrate carrier having door latching and substrate clamping mechanisms

Methods and apparatus for transporting substrate carriers

Systems and methods for transferring small lot size substrate carriers between processing tools

Dynamically balanced substrate carrier handler

Cartesian cluster tool configuration for lithography type processes

Calibration of high speed loader to substrate transport system

Monitoring of smart pin transition timing

Methods and apparatus for integrating large and small lot electronic device fabrication facilities

Method and apparatus for integrating large and small lot electronic device fabrication facilities

Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback

Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event

System for transporting substrate carriers

System for transporting substrate carriers

Scheduling method for processing equipment

Scheduling method for processing equipment

Linked vacuum processing tools and methods of using the same

Systems and methods for transferring small lot size substrate carriers between processing tools

Break-away positioning conveyor mount for accommodating conveyor belt bends

Break-away positioning conveyor mount for accommodating conveyor belt bends

Break-away positioning conveyor mount for accommodating conveyor belt bends

Break-away positioning conveyor mount for accommodating conveyor belt bends

Methods and apparatus for transporting substrate carriers

Method and apparatus for undocking substrate pod with door status check

Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods

Seal rings in electrochemical processors

Methods for moving a substrate carrier

Method and apparatus for supplying substrates to a processing tool

Stabilizing substrate carriers during overhead transport

Load port configurations for small lot size substrate carriers

Break-away positioning conveyor mount for accommodating conveyor belt bends

Methods and apparatus for transporting substrate carriers

Calibration of high speed loader to substrate transport system

Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods

Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods

Break-away positioning conveyor mount for accommodating conveyor belt bends

Overhead transfer flange and support for suspending a substrate carrier

Kinematic pin with shear member and substrate carrier for use therewith

Overhead transfer flange and support for suspending a substrate carrier

Methods and apparatus for transporting substrate carriers

System, methods and apparatus for substrate carrier content verification using a material handling system

Particle reduction via throttle gate valve purge

APPLIED MATERIAL INC

Methods and apparatus for transporting substrate carriers

BACHRACH ROBERT Z

Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated

ENGLHARDT ERIC A

Degassing apparatus adapted to process substrates in multiple tiers with second actuator

KOSHTI SUSHANT S

Methods and apparatus for sensing substrates in carriers