Inventor

PANNING ERIC

US4 patents

Patents

4 patents

US7527920B2May 5, 2009

Active hardmask for lithographic patterning

INTEL CORP2 citations61

US7033739B2Apr 25, 2006

Active hardmask for lithographic patterning

INTEL CORP3 citations61

US7109504B2Sep 19, 2006

Extreme ultraviolet illumination source

INTEL CORP2 citations60

US7154101B2Dec 26, 2006

EUV energy detection

INTEL CORP4 citations57