Inventor
SHU KING-CHANG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “SHU KING-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS7934177B2Apr 26, 2011
Method and system for a pattern layout split
TAIWAN SEMICONDUCTOR MFG19 citations83
US6973636B2Dec 6, 2005
Method of defining forbidden pitches for a lithography exposure tool
TAIWAN SEMICONDUCTOR MFG12 citations82
US7643976B2Jan 5, 2010
Method and system for identifying lens aberration sensitive patterns in an integrated circuit chip
TAIWAN SEMICONDUCTOR MFG6 citations61
US7303841B2Dec 4, 2007
Repair of photolithography masks by sub-wavelength artificial grating technology
TAIWAN SEMICONDUCTOR MFG1 citations48