Inventor

CHANG BIN-CHANG

TW2 patents

Patents

2 patents

US7135257B2Nov 14, 2006

Multi-step phase shift mask and methods for fabrication thereof

TAIWAN SEMICONDUCTOR MFG2 citations58

US7303841B2Dec 4, 2007

Repair of photolithography masks by sub-wavelength artificial grating technology

TAIWAN SEMICONDUCTOR MFG1 citations48